Zeiss Expands German Semiconductor Optics Production by Over 25,000 m² (heise.de)

• 25,000 m² additional production space in Oberkochen
• Zeiss is sole optics supplier for ASML EUV lithography
• ASML capacity ramp of 30% in 2027 and 2028 drives expansion
• High-NA EUV optics module weighs 12 tons, system costs ~€350M
• Expansion also covers mask-making and wafer fab solutions

"Zeiss Semiconductor Manufacturing Technology (SMT) is expanding its Oberkochen site by 25,000 square meters of production space. The company is the sole supplier of optics for ASML's EUV lithography systems, critical for advanced chipmaking. The expansion supports ASML's planned production increase of 30 percent in 2027 and 2028."